六角形孔径平面微透镜阵列的制作及成像
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重庆师范大学 物理学与信息技术学院,重庆400047

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收稿日期:2008-04-15 修回日期:2008-05-15
基金项目:重庆师范大学基金(No.07XS01);重庆市高校光学工程重点实验室开放课题基金(No.0704)
作者简介:张玉(1975),女,助理实验师,硕士,研究方向为微小光学与变折射率光学。


The Manufacture of Hexagon Aperture Plane Micro-lens Array and Its Image
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College of Physics and Information Technology, Chongqing Normal University Chongqing 400047 , China

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    摘要:

    由于传统的圆形孔径透镜阵列填充系数较小,而在模拟复眼光学系统中需要高填充系数的透镜阵列。为提高填充系数,采用光刻离子交换法制作了六角形孔径的平面微透镜阵列,利用积分形式的光线方程式讨论了平面微透镜的近轴光学特性,研究了微透镜的光线轨迹方程式和一些重要的近轴成像特性,利用 BC1D 定理得到了六角形孔径平面微透镜像距、焦距的数学表达式。制作的平面微透镜阵列光学性能均匀,成像质量较好,离子交换后的变折射率区域有微小重叠,较大地提高了微透镜阵列的填充系数。

    Abstract:

    At present the cell array lens is usually cylinder or hemispheroid whose fill-factor (the ratio of light area and total area ) can achieve about 90.7% , so we need higher fill-factor arrays sometimes such as in the compound eye simulation optical system. In order to enhance the fill-factor, we apply the method of the photo etching ionic exchange to manufacture hexagon aperture planar microlens array with the center distance as 160μm .We present a real photograph and an imaging photograph of the array and we apply Jamin Interference method to manufacture hexagon aperture planar micro-lens array’s interference slice and draw the refractive index distribution curve. In the use of ray equations in integral form paraxial optical properties of microlens arrays are studied here. The ray trajectory equation and imaging of microlens arrays are presented. Mathematics expressions of images distance focal length by ABCD law are obtained. This array is arranged in order with a uniform optical feature after the exchange of ions. It has a high fill-factor and a good quality of image along with slight overlaps in the area of Gradient-Index.

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张玉.六角形孔径平面微透镜阵列的制作及成像[J].重庆师范大学学报自然科学版,2008,(3):55-

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